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Electron Beam Sources Detail 

Small Frame (standard configurations)

IEB4002 4x2cc direct cooled electron beam source ideally suited for Universities, R&D Labs

Specifications:

Dimensions- 2.4”H x 4.3”L x 3.0”W
Weight- approx 6lbs
Vacuum rated- 2x10E-8 Torr
Max power- 3kW
Bakeout Temp- 150 C
H2O flow- .50gpm

 

NOTE: can also be flange mounted, please contact us for custom mounting options

Medium Frame (standard configurations)

IEB4007 4x7cc direct cooled electron beam source              
IEB4015 4x15cc
IEB4025 4x25cc
IEB4030 4x30cc
IEB6012 6x12cc

Specifications:

Dimensions- 3.8”H x 6.5”L x 5.7”W
Weight- approx 25lbs
Vacuum rated- 2x10E-8 Torr
Bakeout Temp- 150 C
H2O flow- 2.5gpm

 

Large Frame (standard configurations)

IEB4040 4x40cc direct cooled electron beam source                         
IEB4075 4x75cc
IEB6025 6x25cc
IEB6040 6x40cc
IEB1400 1x400cc pan type source

Specifications:

Dimensions- 3.8”H x 9.0”L x 7.0”W
Weight- approx 40lbs
Vacuum rated- 2x10E-8 Torr
Bakeout Temp- 150 C
H2O flow- 3.0gpm

Thermal Sources

Mounted on 2.750CF flanges and configurable with either filament/boat/or crucible source (shown)

Features:


Mounted on 2.750CF can be mounted on chamber in either vertical or horizontal position
Rated at 150 amp max current
Acrylic high voltage cover included
Air side connectors included
UHV compatible

Call for recommended power supply configurations

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